Offeringabasicintroductiontophysicalprinciplesofmodernsemiconductordevicesandtheiradvancedfabricationtechnology,thisresourcepresentsstudentswiththetheoreticalandpracticalaspectsofeverystepindevicecharacterizationsandfabrication,withanemphasisonintegratedcircuits.Dividedintothreeparts,thetextcoversthebasicpropertiesofsemiconductormaterials,emphasizingsiliconandgalliumarsenide;thephysicsandcharacteristicsofsemiconductordevices;bipolarandunipolarspecialmicrowaveandphotonicdevices;andthelatestprocessingtechnologies,fromcrystalgrowthtolithographicpatterntransfer.
